Automatic Operation Wafer Cleaning Equipment

• After-sales Service: 7*24 Hour After-Sales Service
• Warranty: 12 Months
• Cleaning Process: Wafer Cleaning System
• Shipping Cost: Estimated freight per unit.: about shipping cost and estimated delivery time.
• Currency: US$
• Return&refunds: You can apply for a refund up to 30 days after receipt of the products.
• Model NO.: WZ821
• Style: Debonding and Cleanin Style
• Clean Type: Drying Method
• Usage: Wafer Cleaning
• Principle: Drying Method
• Fuel: Drug Solution
• Certification: CE
• Control: PLC
• Automation: Automatic
• Condition: New
• Remote Control: With Remote Control
• Customized: Non-Customized
• Mttr: 4hrs
• up Time: 95%
• Mtbf: 1000hrs
• Wafer Size: 300mm
• Transport Package: Wooden Crates and Vacuum Wooden Crates
• Specification: W2500*D1400*H2300
• Trademark: Suzhou Bozhon Semiconductor Co
• Origin: China

Product Description

 

Product Description

The WZ821 Wafer Cleaning System is mainly used for debonding and cleaning of

4-inch, 6-inch, 8-inch, and 12-inch silicon wafe.

Detailed Photos

1. Accurate liquid temperature control
The maximum temperature difference among 27 points in total, 9 points per plane ranging from the top, middle, and bottom in the tank is less than 1 ºC. The average working temperature remains stable within ± 1 ºC throughout the entire production.
2. Rapid liquid heating system
The time to raise and stabilize the temperature from room temperature to  95 ° C and raise the pressure to 95P ± 1C is less than 20 minutes using online heating and pre-heating methods, leading to a reduced waiting time and a high efficiency.
3. Advanced drying methods
The equipment utilizes the Marangoni effect, atomizing IPA into the tank through a pipeline and drying with hot nitrogen, greatly improves the level of cleanliness of the product and its drying efficiency

 

 

Product Parameters

 

Product model	WZ821
Silicon wafer size	6 inches (double cassette)
Equipment size	W2500*D1400*H2300
Process	ACT → NMP → QDR → IPA
Process effect	Degumming rate ≥ 99%
UPH	>50pcs
Max processing capacity per Tank	25sheet/1cassette,2cassette/tank
Metal ion detection	<50ppb
Temperature rise time	< 20min ( Heating from roomtemperature to 95 ºC)

 

After Sales Service

Suzhou BOZHON Semiconductor Co., Ltd. was established in 2022 and is a global semiconductor equipment R&D and manufacturing company. With over 20 years of technical expertise in the semiconductor industry, the company provides leading and stable advanced process and inspection equipment to its customers. Suzhou BOZHON Semiconductor is committed to becoming a leader in the Chinese semiconductor industry by developing and innovating products using micrometer, sub-micrometer, and nanometer-level technologies. The company aims to promote the advancement of semiconductor processes and industry upgrades, and continuously provide cutting-edge products to the industry.

Company Profile

1.Where does Bozhon Semiconductor come from?
Bozhon Semiconductor is from Suzhou, China and is part of the Bozhon Precision Industry Group.

2.Are the products self-branded or resold?
All products are self-developed, and many technologies have been awarded national patents.

3.What is the minimum order quantity for the product?
1 set.

4.How long does it take to ship an order?
Within 100 days of signing the contract

5.Is the price on the product page the final price?
No, the final price is based on the specific product model, subject to the actual offer.